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Alignment through topography on intermediate component for memory device patterning

專利號
US11177437B2
公開日期
2021-11-16
申請人
International Business Machines Corporation(US NY Armonk)
發(fā)明人
Hao Tang; Michael Rizzolo; Injo Ok; Theodorus E. Standaert
IPC分類
H01L45/00; H01L23/544; H01L27/24
技術(shù)領(lǐng)域
alignment,layer,dielectric,electrode,metal,assisting,mark,depositing,in,or
地域: NY NY Armonk

摘要

An intermediate semiconductor device structure includes a first area including a memory stack area and a second area including an alignment mark area. The intermediate structure includes a metal interconnect arranged on a substrate in the first area and a first electrode layer arranged on the metal interconnect in the first area, and in the second area. The intermediate structure includes an alignment assisting marker arranged in the second area. The intermediate structure includes a dielectric layer and a second electrode layer arranged on the alignment assisting marker in the second area and on the metal interconnect in the first area. The intermediate structure includes a hard mask layer arranged on the second electrode area. The hard mask layer provides a raised area of topography over the alignment assisting marker. The intermediate structure includes a resist arranged on the hard mask layer in the first area.

說明書

Another non-limiting example of the method includes forming a metal interconnect in a first area of the semiconductor device. The method includes depositing a first electrode layer on the metal interconnect. The method further includes depositing and patterning a film on the first electrode layer to form an alignment assisting marker is a second area of the semiconductor device proximate to the first area. The method includes depositing a dielectric layer and a second electrode layer on the alignment assisting marker in the second area and on the metal interconnect in the first area. The method includes depositing a metal connector layer on the second electrode layer. The method further includes depositing a hard mask layer on the metal connector layer to create a raised area of topography over the alignment assisting marker. The method includes depositing and patterning a resist on the hard mask layer, using the raised area of topography created by the hard mask layer over the alignment assisting marker to align the resist over the metal interconnect in the first area of the semiconductor device. The method further includes etching to form a memory stack over the metal interconnect by transferring the pattern of the resist into the first electrode layer, the dielectric layer, and the second electrode layer in the first area of the semiconductor device.

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