In this embodiment, as shown in FIG. 2 and FIG. 3, the supporting element 1-140 may be a cylinder, but it is not limited thereto. In other embodiments, the supporting element 1-140 may be implemented as a spherical body. The supporting element 1-140 may have an arc surface 1-141 that contacts a bottom surface 1-114BS of the substrate (the circuit member 1-114). Based on the design of the arc surface 1-141, the circuit member 1-114 may move more smoothly.
In addition, it is worth noting that in some embodiments, the substrate (the circuit member 1-114) may be made of a magnetically conductive material, and the substrate corresponds to these first driving magnetic elements 1-MG1. The magnetic attraction force generated between the substrate (the circuit member 1-114) and the first driving magnetic elements 1-MG1 can make the substrate move along the XY plane more stably.
As shown in FIG. 3 and FIG. 4, the first segment 1-SG1 is connected to one end (the first end portion) of the circuit member body 1-1141. Because the connecting portion 1-SCP is connected to the base plate 1-120, there is a distance between the first end portion and the connecting portion 1-SCP (the second end portion) in the main axis (the Z-axis).
