Further, the heat treatment apparatus 1A is provided with the second partition 80 including the first part 80a and the second part 80b extending along the circumferential direction of the processing container 4 from the first partition 70 at one side to the first partition 72 at the other side, at the boundary between the area BTM and the area CB in the space S. Therefore, as illustrated in FIG. 6, the convection occurring in the area BTM is suppressed from being transmitted to the area CB, the area CTR, the area CT, and the area TOP which are areas above the area BTM. As a result, even when change in convection occurs for each run in the area BTM, the influence of the change in convection hardly affects the area CB, the area CTR, the area CT, and the area TOP. As a result, the aspect of the heat treatment for each run becomes substantially the same, and the reproducibility of the heat treatment is improved.
Third Embodiment
(Heat Treatment Apparatus)
An exemplary configuration of a heat treatment apparatus of a third embodiment will be described. FIG. 7 is a longitudinal cross-sectional view illustrating the exemplary configuration of the heat treatment apparatus according to the third embodiment.
