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Apparatus with a substrate provided with plasma treatment

專利號
US11291122B2
公開日期
2022-03-29
申請人
Intel Corporation(US CA Santa Clara)
發(fā)明人
Darko Grujicic; Rengarajan Shanmugam; Sandeep Gaan; Adrian Bayraktaroglu; Roy Dittler; Ke Liu; Suddhasattwa Nad; Marcel A. Wall; Rahul N. Manepalli; Ravindra V. Tanikella
IPC分類
C23C18/38; H05K3/38; C23C18/16; C23C18/18; H01L21/48; H05K3/42; H05K3/46; H05K1/11; H01L23/14
技術(shù)領(lǐng)域
may,substrate,in,plating,metal,copper,surface,die,or,catalyst
地域: CA CA Santa Clara

摘要

Embodiments of the present disclosure describe techniques for providing an apparatus with a substrate provided with plasma treatment. In some instances, the apparatus may include a substrate with a surface that comprises a metal layer to provide signal routing in the apparatus. The metal layer may be provided in response to a plasma treatment of the surface with a functional group containing a gas (e.g., nitrogen-based gas), to provide absorption of a transition metal catalyst into the surface, and subsequent electroless plating of the surface with a metal. The transition metal catalyst is to enhance electroless plating of the surface with the metal. Other embodiments may be described and/or claimed.

說明書

In summary, pre-treating the dielectric surface with nitrogenous gas based plasma may enhance the transition metal catalyst (e.g., Pd) seed coverage of the substrate surface, which in turn may increase the surface coverage with a metal layer to be used for signal routing in a semiconductor device. It should be noted that the plasma treatment process does not have an image by itself, and may manifest itself as an increased Pd seed coverage on the substrate surface, as illustrated by view 230 of FIG. 2. FIG. 5 illustrates an example computing device that may employ the apparatuses and/or methods described herein, according to various embodiments.

The motherboard 502 of the computing device 500 may include a number of components, including but not limited to a processor 504 and at least one communication chip 506. The processor 504 may be physically and electrically coupled to the motherboard 502. In some implementations, the communication chip 506 may also be physically and electrically coupled to the motherboard 502. In further implementations, the communication chip 505 may be part of the processor 504. In addition, the computing device 500 may further include an antenna 516.

權(quán)利要求

1
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