Semiconductor apparatus and equipment
地域：
Tokyo
摘要
A semiconductor apparatus includes a stack of first and second chips each having a plurality of pixel circuits arranged in a matrix form. The pixel circuit of the a-th row and the e1-th column is connected to the electric circuit of the p-th row and the v-th column. The pixel circuit of the a-th row and the f1-th column is connected to the electric circuit of the q-th row and the v-th column. The pixel circuit of the a-th row and the g1-th column is connected to the electric circuit of the r-th row and the v-th column. The pixel circuit of the a-th row and the h1-th column is connected to the electric circuit of the s-th row and the v-th column.
說明書
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This application is a Continuation of U.S. application Ser. No. 16/851,854, filed Apr. 17, 2020; which is a Continuation of U.S. application Ser. No. 16/142,651, filed Sep. 26, 2018, now U.S. Pat. No. 10,674,106, issued Jun. 2, 2020; which claims priority from Japanese Patent Application No. 2017-192050 filed Sep. 29, 2017, which are hereby incorporated by reference herein in their entireties.
One disclosed aspect of the embodiments relates to a semiconductor apparatus having a stack of a plurality of chips.
An imaging apparatus having a stack of a chip including a pixel circuit and a chip including an electric circuit configured to process a signal from the pixel circuit may be used for greatly improved values of the imaging apparatus. Japanese Patent Laid-Open No. 2012-104684 and Japanese Patent Laid-Open No. 2013-51674 disclose that a substrate having a plurality of column circuits thereon and a substrate having a pixel unit thereon are stacked.
An electric circuit configured to process a signal may have a varied property depending on the position of the electric circuit. According to a correspondence relationship between an electric circuit and a pixel circuit, a resulting image may have unevenness (shading) due to such varied properties of the electric circuit.
權(quán)利要求
What is claimed is:1. A semiconductor apparatus comprising:a plurality of conductor portions; and a stack of a first chip and a second chip, the first chip having a plurality of pixel circuits arranged on a plurality of rows and a plurality of columns and a plurality of signal lines, the second chip having a plurality of electric circuits; wherein a first signal line of the plurality of signal lines is connected to a pixel circuit of an a-th row and an e1-th column, is connected to a first electric circuit of the plurality of electric circuits via a first conductor portion of the plurality of conductor portions, and does not extend to a position of a pixel circuit of a b-th row and the e1-th column, wherein a second signal line of the plurality of signal lines is connected to the pixel circuit of the b-th row and the e1-th column, is connected to a second electric circuit of the plurality of electric circuits via a second conductor portion of the plurality of conductor portions, and does not extend to a position of the pixel circuit of the a-th row and the e1-th column, and wherein a virtual straight line extending in a direction along the e1-th column passes through the first conductor portion and the second conductor portion, wherein the first signal line extends in the direction, and the second signal line extends in the direction. 2. The semiconductor apparatus according to claim 1 ,wherein a third signal line of the plurality of signal lines is connected to a pixel circuit of the a-th row and an e2-th column, is connected to a third electric circuit of the plurality of electric circuits via a third conductor portion of the plurality of conductor portions, and does not extend to a position of a pixel circuit of the b-th row and the e2-th column, wherein a fourth signal line of the plurality of signal lines is connected to the pixel circuit of the b-th row and the e2-th column, is connected to a fourth electric circuit of the plurality of electric circuits via a fourth conductor portion of the plurality of conductor portions, and does not extend to a position of the pixel circuit of the a-th row and the e2-th column, and wherein a virtual straight line extending in a direction along the e2-th column passes through the third conductor portion and the fourth conductor portion. 3. The semiconductor apparatus according to claim 2 ,wherein a virtual straight line extending in a direction along the a-th row passes through the first conductor portion and the third conductor portion. 4. The semiconductor apparatus according to claim 3 ,wherein a virtual straight line extending in a direction along the b-th row passes through the second conductor portion and the fourth conductor portion. 5. The semiconductor apparatus according to claim 1 ,wherein each of the plurality of conductor portions is made of copper. 6. The semiconductor apparatus according to claim 1 ,wherein the plurality of conductor portions is formed in the first chip. 7. The semiconductor apparatus according to claim 6 ,wherein each of the plurality of conductor portions is formed in a recess of an insulating film in the first chip. 8. The semiconductor apparatus according to claim 1 ,wherein each of the plurality of conductor portions is formed in a recess of an insulating film in the first chip, wherein each of the plurality of conductor portions is bonded to another conductor portion, of the second chip, made of copper and formed in a recess of an insulating film in the second chip, and wherein the insulating film in the first chip and the insulating film in the second chip are bonded to each other. 9. The semiconductor apparatus according to claim 1 ,wherein each of the plurality of electric circuits includes an analog-digital converter. 10. The semiconductor apparatus according to claim 9 ,wherein the analog-digital converter is a successive approximation register analog-digital converter. 11. The semiconductor apparatus according to claim 1 ,wherein each of the plurality of electric circuits includes multiplexer. 12. The semiconductor apparatus according to claim 1 ,wherein each of the plurality of electric circuits includes a multiplexer and an analog-digital converter, wherein an input part of the multiplexer is connected to at least two of the plurality of pixel circuits, and wherein an output part of the multiplexer is connected to the analog-digital converter. 13. The semiconductor apparatus according to claim 12 ,wherein each of the plurality of electric circuits includes a sensing amplifier connected to an output part of the analog-digital converter. 14. Equipment comprising:the semiconductor apparatus according to claim 2 ; and further comprising at least some of: an optical system configured to be focused on the semiconductor apparatus; a control apparatus configured to control the semiconductor apparatus; a processing apparatus configured to process a signal output from the semiconductor apparatus; a machine configured to be controlled based on information obtained by the semiconductor apparatus; a display apparatus configured to display the information obtained by the semiconductor apparatus; and a memory configured to store the information obtained by the semiconductor apparatus. 15. The semiconductor apparatus according to claim 1 , whereina virtual straight line extending in the direction from the first signal line overlaps with the second signal line in plan view. 16. The semiconductor apparatus according to claim 1 , whereina virtual straight line extending in the direction from the first signal line is in contact with the second signal line. 17. A semiconductor apparatus comprising:a plurality of conductor portions; and a stack of a first chip and a second chip, the first chip having a plurality of pixel circuits arranged on a plurality of rows and a plurality of columns and a plurality of signal lines, the second chip having a plurality of electric circuits; wherein a first signal line of the plurality of signal lines is connected to a pixel circuit of an a-th row and an e1-th column, and is connected to a first electric circuit of the plurality of electric circuits via a first conductor portion of the plurality of conductor portions, wherein a second signal line of the plurality of signal lines is connected to a pixel circuit of an e2-th column, and is connected to a second electric circuit of the plurality of electric circuits via a second conductor portion of the plurality of conductor portions, wherein a third signal line of the plurality of signal lines is connected to a pixel circuit of an e3-th column, and is connected to a third electric circuit of the plurality of electric circuits via a third conductor portion of the plurality of conductor portions, wherein a fourth signal line of the plurality of signal lines is connected to a pixel circuit of an e4-th column, and is connected to a fourth electric circuit of the plurality of electric circuits via a fourth conductor portion of the plurality of conductor portions, wherein the second signal line and the third signal line are arranged between the first signal line and the fourth signal line, wherein a first virtual straight line extending in a direction along the a-th row passes through the first conductor portion and the fourth conductor portion, and does not pass through the second conductor portion and the third conductor portion, and, on the first virtual straight line, there exists no other conductor portion among the plurality of conductor portions between the first conductor portion and the fourth conductor portion, wherein a second virtual straight line extending in the direction passes through the second conductor portion and the third conductor portion, and, on the second virtual straight line, there exists no other conductor portion among the plurality of conductor portions between the second conductor portion and the third conductor portion, and wherein a length between the first conductor portion and the fourth conductor portion is greater than a length between the second conductor portion and the third conductor portion. 18. The semiconductor apparatus according to claim 17 ,wherein the second virtual straight line does not pass through the first conductor portion and the fourth conductor portion. 19. The semiconductor apparatus according to claim 17 ,wherein the plurality of pixel circuits are arranged in a matrix form of J rows and K columns, wherein the plurality of electric circuits are arranged in a matrix form of T rows and U columns, and wherein each of J, K, T, and U is a natural number equal to or greater than 2, and T<J, and U<K, are satisfied. 20. The semiconductor apparatus according to claim 17 ,wherein a fifth signal line of the plurality of signal lines is connected to a pixel circuit of an e5-th column, and is connected to a fifth electric circuit of the plurality of electric circuits via a fifth conductor portion of the plurality of conductor portions, wherein a sixth signal line of the plurality of signal lines is connected to a pixel circuit of an e6-th column, and is connected to a sixth electric circuit of the plurality of electric circuits via a sixth conductor portion of the plurality of conductor portions, wherein the fifth signal line and the sixth signal line are arranged between the first signal line and the fourth signal line, and wherein a length between the first conductor portion and the fourth conductor portion is greater than a length between the fifth conductor portion and the sixth conductor portion. 21. The semiconductor apparatus according to claim 20 ,wherein the fifth signal line is arranged between the first signal line and the second signal line, wherein the sixth signal line is arranged between the third signal line and the fourth signal line, and wherein the length between the fifth conductor portion and the sixth conductor portion is greater than a length between the second conductor portion and the third conductor portion. 22. The semiconductor apparatus according to claim 17 ,wherein each of the plurality of conductor portions is made of copper. 23. The semiconductor apparatus according to claim 17 ,wherein the plurality of conductor portions is formed in the first chip. 24. The semiconductor apparatus according to claim 23 ,wherein each of the plurality of conductor portions is formed in a recess of an insulating film in the first chip. 25. The semiconductor apparatus according to claim 17 ,wherein each of the plurality of conductor portions is formed in a recess of an insulating film in the first chip, wherein each of the plurality of conductor portions is bonded to another conductor portion, of the second chip, made of copper and formed in a recess of an insulating film in the second chip, and wherein the insulating film in the first chip and the insulating film in the second chip are bonded to each other. 26. The semiconductor apparatus according to claim 17 ,wherein each of the plurality of electric circuits includes an analog-digital converter. 27. The semiconductor apparatus according to claim 26 ,wherein the analog-digital converter is a successive approximation register analog-digital converter. 28. The semiconductor apparatus according to claim 17 ,wherein each of the plurality of electric circuits includes multiplexer. 29. The semiconductor apparatus according to claim 17 ,wherein each of the plurality of electric circuits includes a multiplexer and an analog-digital converter, wherein an input part of the multiplexer is connected to at least two of the plurality of pixel circuits, and wherein an output part of the multiplexer is connected to the analog-digital converter. 30. The semiconductor apparatus according to claim 29 ,wherein each of the plurality of electric circuits includes a sensing amplifier connected to an output part of the analog-digital converter. 31. Equipment comprising:the semiconductor apparatus according to claim 6 ; and further comprising at least some of: an optical system configured to be focused on the semiconductor apparatus; a control apparatus configured to control the semiconductor apparatus; a processing apparatus configured to process a signal output from the semiconductor apparatus; a machine configured to be controlled based on information obtained by the semiconductor apparatus; a display apparatus configured to display the information obtained by the semiconductor apparatus; and a memory configured to store the information obtained by the semiconductor apparatus.
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