The first upper holes 145b and the first lower holes 145a may be formed by etching the circuit film 140. In an embodiment, the first lower holes 145a and the first upper holes 145b may be formed by a wet etching method. In another embodiment, the first lower holes 145a and the first upper holes 145b may be formed by a dry etching method. In still another embodiment, the first lower holes 145a and the first upper holes 145b may be formed by applying a physical force. For example, the first lower holes 145a and the first upper holes 145b may be formed by a punching method.
As illustrated in