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Single well one transistor and one capacitor nonvolatile memory device and integration schemes

專利號
US11659709B2
公開日期
2023-05-23
申請人
GLOBALFOUNDRIES Singapore Pte. Ltd.(SG Singapore)
發(fā)明人
Xinshu Cai; Shyue Seng Tan; Juan Boon Tan; Kiok Boone Elgin Quek; Eng Huat Toh
IPC分類
H01L27/11521; H01L29/66; H01L49/02; H01L29/788; H01L29/06
技術領域
floating,gate,capacitor,112a,112b,region,first,active,110a,dielectric
地域: Singapore

摘要

A nonvolatile memory device is provided. The nonvolatile memory device comprises an active region surrounded by an isolation structure. A floating gate may be arranged over the active region, the floating gate having a first end and a second end over the isolation structure. A first doped region may be provided in the active region adjacent to a first side of the floating gate and a second doped region may be provided in the active region adjacent to a second side of the floating gate. A first capacitor may be provided over the floating gate, whereby a first electrode of the first capacitor is electrically coupled to the floating gate. A second capacitor may be provided, whereby a first electrode of the second capacitor is over the isolation structure and adjacent to the floating gate.

說明書

FIG. 8 is a cross-section view of a partially completed nonvolatile memory device array 200 taken along section line E-E′ of FIG. 2A after formation of a dielectric layer 102, a first floating gate 112a, a second floating gate 112b, a first electrode 208 of a second capacitor and a spacer dielectric 210, according to an embodiment of the disclosure. The formation of the dielectric layer 102 may include depositing a layer of suitable dielectric material, for example silicon dioxide, over the first active region 110a, over the second active region 110b and over the isolation structure 218. A layer of polysilicon may be deposited over the silicon dioxide layer followed by doping with a suitable n-type dopant, for example phosphorus. The doped polysilicon layer and the silicon dioxide layer may be patterned by a conventional photoresist process followed by a wet etch or dry etch to form the first floating gate 112a, the second floating gate 112b, the first electrode 208 of the second capacitor between the first floating gate 112a and the second floating gate 112b and the dielectric layer 102, respectively. The formation of the first floating gate 112a, the second floating gate 112b and the first electrode 208 of the second capacitor between the first floating gate 112a and the second floating gate 112b may be done in the same process and from the same doped polysilicon layer.

權利要求

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