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Single well one transistor and one capacitor nonvolatile memory device and integration schemes

專利號
US11659709B2
公開日期
2023-05-23
申請人
GLOBALFOUNDRIES Singapore Pte. Ltd.(SG Singapore)
發(fā)明人
Xinshu Cai; Shyue Seng Tan; Juan Boon Tan; Kiok Boone Elgin Quek; Eng Huat Toh
IPC分類
H01L27/11521; H01L29/66; H01L49/02; H01L29/788; H01L29/06
技術(shù)領(lǐng)域
floating,gate,capacitor,112a,112b,region,first,active,110a,dielectric
地域: Singapore

摘要

A nonvolatile memory device is provided. The nonvolatile memory device comprises an active region surrounded by an isolation structure. A floating gate may be arranged over the active region, the floating gate having a first end and a second end over the isolation structure. A first doped region may be provided in the active region adjacent to a first side of the floating gate and a second doped region may be provided in the active region adjacent to a second side of the floating gate. A first capacitor may be provided over the floating gate, whereby a first electrode of the first capacitor is electrically coupled to the floating gate. A second capacitor may be provided, whereby a first electrode of the second capacitor is over the isolation structure and adjacent to the floating gate.

說明書

FIG. 1A is a top view of a nonvolatile memory device array 100, according to an embodiment of the disclosure. Referring to FIG. 1A, the nonvolatile memory device array 100 comprises a first active region 110a and a second active region 110b and an isolation structure 118 surrounding each active region, 110a and 110b. The isolation structure 118 is shown as a dashed outline. In an embodiment, the isolation structure 118 may be shallow trench isolation (STI). A portion of the isolation structure 118 is between the first active region 110a and the second active region 110b. The isolation structure 118 and the active regions 110a and 110b may be formed in a semiconductor substrate 180. The first active region 110a and the second active region 110b may collectively be referred to as active regions 110.

權(quán)利要求

1
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