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Ferroelectric device film stacks with texturing layer, and method of forming such

專利號(hào)
US11659714B1
公開日期
2023-05-23
申請(qǐng)人
Kepler Computing Inc.(US CA San Francisco)
發(fā)明人
Niloy Mukherjee; Ramamoorthy Ramesh; Sasikanth Manipatruni; James Clarkson; FNU Atiquzzaman; Gabriel Antonio Paulius Velarde; Jason Y. Wu
IPC分類
H01L27/11507; H01L27/11502; H01L49/02; H01L27/11597; H01L27/11592; H01L27/11587
技術(shù)領(lǐng)域
templating,lattice,layer,or,angstroms,in,structure,constant,fe,some
地域: CA CA San Francisco

摘要

Described are ferroelectric device film stacks which include a templating or texturing layer or material deposited below a ferroelectric layer, to enable a crystal lattice of the subsequently deposited ferroelectric layer to template off this templating layer and provide a large degree of preferential orientation despite the lack of epitaxial substrates.

說明書

FIG. 2A illustrates a three-dimensional (3D) view of a bit-cell comprising a planar transistor and an FE capacitor with templating or texturing layer, in accordance with some embodiments.

FIG. 2B illustrates a 3D view of a bit-cell comprising a non-planar transistor and an FE capacitor with templating or texturing layer, in accordance with some embodiments.

FIG. 3 illustrates a 3D view of the FE capacitive structure with templating or texturing layer, in accordance with some embodiments.

FIG. 4 illustrates a 3D view of the FE capacitive structure where a bottom electrode and a templating layer are integrated together, in accordance with some embodiments.

FIG. 5 illustrates a 3D view of the FE capacitive structure where a bottom electrode, a templating layer, and a barrier layer are integrated together, in accordance with some embodiments.

FIG. 6 illustrates a flowchart of a method for forming the FE capacitive structure of FIG. 3, in accordance with some embodiments.

FIG. 7 illustrates a flowchart of a method for forming the FE capacitive structure of FIG. 4, in accordance with some embodiments.

FIG. 8 illustrates a flowchart of a method for forming the FE capacitive structure of FIG. 5, in accordance with some embodiments.

權(quán)利要求

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