Subsequently, the green compact after the binder removal treatment is fired. As the firing conditions, the holding temperature is preferably 950° C. to 1060° C., the temperature holding time is preferably 2 hours to 4 hours, the temperature rising and cooling rate is preferably about 50° C./hour to 300° C./hour, the atmosphere is preferably an oxygen-containing atmosphere. Among the firing conditions, the CV value of the Mn concentration can be controlled by adjusting the holding temperature.

The obtained piezoelectric composition as a sintered body is polished if necessary, an electrode paste is applied and baked to form an electrode. The method for forming the electrodes is not particularly limited, and electrodes may be formed by a vapor deposition, a sputtering, etc.

The sintered body on which the electrode is formed is processed into a predetermined size as necessary, and an electric field of 2 kV/mm to 5 kV/mm is applied to the sintered body for about 5 minutes to 1 hour in oil at a predetermined temperature to pole the sintered body. After the poling processing, a piezoelectric composition in which the spontaneous polarization is aligned in a predetermined direction is obtained.

The piezoelectric composition after the poling processing is processed to a plate-shaped piezoelectric part 1. Next, the electrodes 2 and 3 are formed on the piezoelectric part 1 by such as a vapor deposition, whereby the piezoelectric element shown in FIG. 1 is obtained.