The groove 15 includes a concave portion 151. The concave portion 151 is located at the conductive hole 12, and the diameter of the concave portion 151 is larger than the diameter of the conductive hole 12.
In a fifth step, a surface treatment is performed on a side wall and a bottom wall of each of the two grooves 15 to increase roughness.
In a sixth step, the two peelable films 13 are removed.
In a seventh step, a seed layer is formed on the side wall and bottom wall of each of the two grooves 15.
In an eighth step, referring to
Each of the circuit layers 20 includes a connection pad 21 located in the concave portion 151. The shape of the connection pad 21 is a conductive protrusion, and the two circuit layers 20 are electrically connected through the conductor 111.
The substrate 10 has a conductive hole 12 penetrating therethrough. A conductor 111 is provided in the conductive hole 12.