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3D ferroelectric memory

專利號
US11770935B2
公開日期
2023-09-26
申請人
Taiwan Semiconductor Manufacturing Company, Ltd.(TW Hsinchu)
發(fā)明人
Sheng-Chih Lai; Chung-Te Lin
IPC分類
H01L21/00; H10B51/20; H01L29/78; H01L21/28; H01L29/66; H10B51/30; H10B51/40
技術(shù)領(lǐng)域
mfis,dielectric,layer,drain,gate,memory,106u,106l,electrode,array
地域: Hsin-Chu

摘要

Various embodiments of the present disclosure are directed towards a metal-ferroelectric-insulator-semiconductor (MFIS) memory device, as well as a method for forming the MFIS memory device. According to some embodiments of the MFIS memory device, a lower source/drain region and an upper source/drain region are vertically stacked. A semiconductor channel overlies the lower source/drain region and underlies the upper source/drain region. The semiconductor channel extends from the lower source/drain region to the upper source/drain region. A control gate electrode extends along a sidewall of the semiconductor channel and further along individual sidewalls of the lower and upper source/drain regions. A gate dielectric layer and a ferroelectric layer separate the control gate electrode from the semiconductor channel and the lower and upper source/drain regions.

說明書

While FIGS. 3A-3G illustrate cross-sectional views 300A-300G of some alternative embodiments of FIG. 2A in which constituents are modified, it is to be appreciated that the modifications may also be applied to any of FIGS. 2B-2D. For example, when applying the modifications of FIG. 3A to FIGS. 2B-2D, the gate dielectric layer 110 and the ferroelectric layer 112 may be cleared from atop the array dielectric layer 210 of the second memory array 204b in FIGS. 2B and 2C. FIG. 2D may be remain unchanged. While FIG. 2D is described with regard to FIGS. 2A-2C, any of FIGS. 3A-3G may be taken along line C in embodiments of FIG. 2D which have been modified as necessary as described above. For example, FIG. 3G may be taken along line C in alternative embodiments of FIG. 2D in which the dielectric structure 116 has been replaced with the cavities 302. As another example, FIGS. 3A-3C may be taken along line C in the embodiments of FIG. 2D without modification of FIG. 2D.

權(quán)利要求

1
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