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Memory array and methods used in forming a memory array

專利號(hào)
US11937423B2
公開日期
2024-03-19
申請(qǐng)人
Micron Technology, Inc.(US ID Boise)
發(fā)明人
Luan C. Tran; Guangyu Huang; Haitao Liu
IPC分類
H10B41/27; G11C5/06; H10B41/35; H10B41/60; H10B43/27; H10B43/35
技術(shù)領(lǐng)域
tier,tiers,gate,select,material,wordline,insulative,insulator,e.g,conductive
地域: ID ID Boise

摘要

A method used in forming a memory array, comprises forming a substrate comprising a conductive tier, an insulator etch-stop tier above the conductive tier, a select gate tier above the insulator etch-stop tier, and a stack comprising vertically-alternating insulative tiers and wordline tiers above the select gate tier. Etching is conducted through the insulative tiers, the wordline tiers, and the select gate tier to and stopping on the insulator etch-stop tier to form channel openings that have individual bottoms comprising the insulator etch-stop tier. The insulator etch-stop tier is penetrated through to extend individual of the channel openings there-through to the conductive tier. Channel material is formed in the individual channel openings elevationally along the insulative tiers, the wordline tiers, and the select gate tier and is directly electrically coupled with the conductive material in the conductive tier. Structure independent of method is disclosed.

說(shuō)明書

In one embodiment, the conducting metal material (e.g., 48) is below the conductively-doped semiconductive material (e.g., 17), for example as shown in an alternate embodiment construction 10a in FIG. 18. Like numerals from the above-described embodiments have been used where appropriate with some construction differences being indicated with the suffix “a”. Any other attribute(s) or aspect(s) as shown and/or described herein with respect to other embodiments may be used.

權(quán)利要求

1
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