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Electrical devices with electrodes on softening polymers and methods of manufacturing thereof

專利號
US11991836B2
公開日期
2024-05-21
申請人
Board of Regents, The University of Texas System(US TX Austin)
發(fā)明人
Romil Modi; Jonathan Reeder; Gregory T. Ellson; Walter E. Voit; Alexandra Joshi Imre
IPC分類
H05K1/09; H05K1/11; H05K3/00; H05K3/04; H05K3/06; H05K3/12; H05K3/40; H01L21/033; H05K1/03; H05K3/34
技術(shù)領(lǐng)域
softening,layer,polymer,electrode,liftoff,solder,inorganic,hardmask,trace,in
地域: TX TX Austin

摘要

An electrical device, comprising a softening polymer layer, an electrode layer on a surface of the softening polymer layer and a cover polymer layer on the surface of the softening polymer layer. An opening in the polymer cover layer is filled with a reflowed solder, one end of the reflowed solder, located inside the opening, contacts a contact pad site portion of the electrode layer, and another end of the reflowed solder contacts an electrical connector electrode of the device.

說明書

FIGS. 3A-3G show an example flexible electrical device 300 of the disclosure at intermediate stages of an example manufacturing process of the disclosure with double softening polymer layer-containing embodiments.

FIG. 3A shows the device 300 after forming a softening polymer layer 105 with a thin film electrode trace 140 thereon. As further illustrated, some embodiments of the device 300 can optionally further include a thin film electrode interaction pad 260 on the electrode trace 140.

The softening polymer layer 105, electrode trace 140 and the optional electrode interaction pad 260 can be composed of any of the materials, have any of the thicknesses, and, be formed by any of the processes, as disclosed elsewhere herein in the context of FIGS. 1A-1E and FIGS. 2A-2J and 2L-2M.

FIG. 3B shows the device 300 during an optional reactive ion etch surface treatment of an exposed surface 305 of the softening polymer layer 105 to form a treated softening polymer layer surface 310. We discovered that for some embodiments, a subsequently formed cover layer composed of the second softening polymer may not adhere as well to the softening polymer layer 105 as desired, and consequently, the layer may be prone to delamination. In some embodiments, the formation of a treated softening polymer layer surface 310 facilitates adhesion of second softening polymer cover layer to the softening polymer layer 105.

權(quán)利要求

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