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Electrical devices with electrodes on softening polymers and methods of manufacturing thereof

專利號
US11991836B2
公開日期
2024-05-21
申請人
Board of Regents, The University of Texas System(US TX Austin)
發(fā)明人
Romil Modi; Jonathan Reeder; Gregory T. Ellson; Walter E. Voit; Alexandra Joshi Imre
IPC分類
H05K1/09; H05K1/11; H05K3/00; H05K3/04; H05K3/06; H05K3/12; H05K3/40; H01L21/033; H05K1/03; H05K3/34
技術領域
softening,layer,polymer,electrode,liftoff,solder,inorganic,hardmask,trace,in
地域: TX TX Austin

摘要

An electrical device, comprising a softening polymer layer, an electrode layer on a surface of the softening polymer layer and a cover polymer layer on the surface of the softening polymer layer. An opening in the polymer cover layer is filled with a reflowed solder, one end of the reflowed solder, located inside the opening, contacts a contact pad site portion of the electrode layer, and another end of the reflowed solder contacts an electrical connector electrode of the device.

說明書

FIGS. 2A-2J and 2L-2M show an example covered flexible electrical device of the disclosure at intermediate stages of an example manufacturing process of the disclosure which includes another example lift-off process embodiment of the disclosure;

FIGS. 3A-3G show an example flexible electrical device of the disclosure at intermediate stages of an example manufacturing process of the disclosure with double softening polymer layer-containing embodiments of the disclosure; and

FIGS. 4A-4F show an example flexible electrical device of the disclosure at intermediate stages of an example manufacturing process of the disclosure using a solder reflow process embodiment of the disclosure.

DETAILED DESCRIPTION

The different fabrication processes disclosed herein are each designed to improve the utility of the resulting flexible electrical devices. In some embodiments, these processes can be performed independently of each other in separate process flows to provide different types of improvements in the respective resulting devices. In other embodiments, any combination of these processes may be performed in a same process flow to provide a combination of improvements in the resulting device.

While the disclosed embodiments refer to electrode layers such as electrode traces and electrode pads, any of these embodiments could further include transistors, diodes, switches, circuits, or other electrical components, located on the softening polymer layer and, e.g., connected to some such electrode layers.

Lift-Off Process for Forming Electrodes on Softening Polymers

權利要求

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