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Three-dimensional memory

專利號(hào)
US11991887B2
公開日期
2024-05-21
申請(qǐng)人
Taiwan Semiconductor Manufacturing Company, Ltd.(TW Hsinchu)
發(fā)明人
Chenchen Jacob Wang; Chun-Chieh Lu; Yi-Ching Liu
IPC分類
H10B51/40; G11C11/22; G11C16/08; H01L23/522; H10B43/27; H10B43/40; H10B51/20; H10B43/10; H10B51/10
技術(shù)領(lǐng)域
bit,sub,memory,lv0,line,conductive,bl0_0,in,structure,lines
地域: Hsinchu

摘要

Three-dimensional memories are provided. A three-dimensional memory includes a memory cell array, a first interconnect structure, a bit line decoder and a second interconnect structure. The bit line decoder is formed under the memory cell array and the first interconnect structure. The memory cell array includes a plurality of memory cells formed in a plurality of levels stacked in a first direction. The first interconnect structure includes at least one bit line extending in a second direction that is perpendicular to the first direction. The bit line includes a plurality of sub-bit lines stacked in the first direction. Each of the sub-bit lines is coupled to the memory cells that are arranged in a line in the corresponding level of the memory cell array. The second interconnect structure is configured to connect the bit line to the bit line decoder passing through the first interconnect structure.

說明書

The memory cells 30 of the same level in the memory cell array 10 may share the sub-bit line or the sub-source line. Moreover, the memory cells 30 of the different levels in the memory cell array 10 may not share the sub-bit line and the sub-source line.

In some embodiments, the bit lines BL (e.g., sub-bit lines BL0_0-BL0_2, BL1_0-BL1_2 and BL2_0-BL2_2) are coupled to the other circuits through the higher metal layer, and the source lines SL (e.g., sub-source lines SL0_0-SL0_2 and SL1_0-SL1_2) are coupled to the other circuits through the higher metal layer.

The three-dimensional memory 100 further includes multiple word lines (not shown) coupled to the memory cell array 10 through the word line via WL_via. The word lines are coupled between the memory cell array 10 and a word line driver (or decoder) (not shown), and the word lines are configured to provide word line information to the memory cells 30 of the memory cell array 10. In some embodiments, the word lines are formed in the same layer under the memory cell array 10. In some embodiments, the word lines are formed in the same layer over the memory cell array 10. In some embodiments, the memory cells 30 of the different levels in the memory cell array 10 may share the same word line.

權(quán)利要求

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