Electrochemical energy storage devices
地域：
CO
CO Aspen
摘要
Integrated devices comprising integrated circuits and energy storage devices are described. Disclosed energy storage devices correspond to an all-solid-state construction, and do not include any gels, liquids, or other materials that are incompatible with microfabrication techniques. Disclosed energy storage device comprises energy storage cells with electrodes comprising metal-containing compositions, like metal oxides, metal nitrides, or metal hydrides, and a solid state electrolyte.
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To maintain the amorphous character of the electrolyte, an electrode that is deposited over the amorphous electrolyte optionally may occur by carefully controlling the deposition conditions, such as temperature, pressure, precursor selection, and the like. For example, the electrode may optionally be deposited at a relatively low temperature. Example deposition temperatures for the electrode are at or about 100° C., 110° C., 120° C., 130° C., 140° C., 150° C., 160° C., 170° C., 180° C., 190° C., 200° C., 210° C., 220° C., 230° C., 240° C., or 250° C., between 0° C. and 250° C., between 50° C. and 250° C., between 100° C. and 250° C., between 150° C. and 250° C., or between 200° C. and 250° C.
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