Method for manufacturing a transducer unit
地域：
Graz
摘要
A method for manufacturing a transducer unit for converting electrical signals into deflections and/or deflections into electrical signals, in which a transducer element is arranged on a support element, which is coupled to a diaphragm unit, which is deflectable along a stroke axis, includes the step of casting a fluid and curable diaphragm material onto a reinforcing element of the diaphragm unit to form a flexible diaphragm element. The diaphragm unit is coupled or coupleable to the transducer element. The diaphragm element, together with the reinforcing element, at least partially form the diaphragm unit. A transducer unit includes a diaphragm unit having a reinforcing element and a flexible diaphragm element formed of a fluid and curable diaphragm material that has been cast onto the reinforcing element.
說明書
The present invention relates to a method for manufacturing a transducer unit, in particular a MEMS transducer unit, for converting electrical signals into deflections and/or deflections into electrical signals, in which at least one transducer element is arranged on a support element, and the transducer element is coupled to a diaphragm unit, which is deflectable along a stroke axis. Moreover, the invention relates to a transducer unit.
DE 603 13 715 T2 describes a method for manufacturing a transducer unit. This takes place in that a sacrificial layer is applied onto a substrate. Thereafter, a diaphragm layer, a lower electrode layer, an active layer, and an upper electrode layer are consecutively applied. A disadvantage thereof is that the manufacturing method is complex.
The object of the present invention is therefore to create a flexible manufacturing method for a transducer unit and a transducer unit.
The object is achieved by means of a method for manufacturing a transducer unit described more fully below, and by a transducer unit having the features described more fully below.
權(quán)利要求
What is claimed is:1. A method for manufacturing a transducer unit for converting electrical signals into deflections and/or converting deflections into electrical signals, the transducer unit including a transducer element arranged on a support element and coupled to a diaphragm unit, which is deflectable along a stroke axis, the method comprising the steps of:forming a pouring port in the support element; casting a fluid and curable diaphragm material onto a reinforcing element of the diaphragm unit to form a flexible diaphragm element, wherein the diaphragm unit is arranged at a top side of the transducer unit and the pouring port is arranged at an underside of the transducer unit and the diaphragm material is poured through the pouring port from the underside of the transducer unit; and wherein the reinforcing element is coupled or coupleable to the transducer element, and so that the diaphragm unit is at least partially formed by the flexible diaphragm element and the reinforcing element. 2. A method for manufacturing a transducer unit for converting electrical signals into deflections and/or converting deflections into electrical signals, the transducer unit including a transducer element arranged on a support element and coupled to a diaphragm unit, which is deflectable along a stroke axis, the method comprising the steps of:casting a fluid and curable diaphragm material onto a reinforcing element of the diaphragm unit to form a flexible diaphragm element, wherein the reinforcing element is coupled or coupleable to the transducer element, and so that the diaphragm unit is at least partially formed by the flexible diaphragm element and the reinforcing element; wherein the reinforcing element is arranged in such a way that the diaphragm unit is formed separately from the transducer element. 3. The method as claimed in claim 1 , wherein the transducer element is coupled to the reinforcing element before the step of casting the fluid and curable diaphragm material onto the reinforcing element to form the diaphragm element on the reinforcing element. 4. The method as claimed in claim 1 , wherein the transducer element is arranged in a receiving space of a dam arrangement so that the transducer element and/or the reinforcing element are/is completely bordered by the dam arrangement. 5. The method as claimed in claim 4 , wherein the diaphragm element is cast onto the reinforcing element in a transverse direction oriented transversely to the stroke axis and/or that the diaphragm element is cast onto the dam arrangement, and/or that the diaphragm element is arranged between the reinforcing element and the dam arrangement. 6. The method as claimed in claim 1 , wherein the diaphragm element is cast onto a peripheral side of the reinforcing element and/or that the diaphragm material is cast, in the direction of the stroke axis, at least partially, in an edge area, onto a first side face and/or a second side face of the reinforcing element so that the diaphragm element is formed at least partially at the first side face and/or the second side face of the reinforcing element. 7. The method as claimed in claim 4 , wherein the dam arrangement, the transducer element and/or the reinforcing element are arranged with respect to one another in such a way that the reinforcing element is spaced apart from the dam arrangement and/or that the diaphragm element is arranged in such a way that it is spaced apart from the transducer element. 8. The method as claimed in claim 4 , wherein the reinforcing element and/or the transducer element are/is arranged coaxially to the dam arrangement. 9. The method as claimed in claim 1 , wherein a coupling element is arranged between the transducer element and the reinforcing element. 10. The method as claimed in claim 4 , wherein, in order to form the diaphragm element, the diaphragm material is poured into a diaphragm volume, which adjoins the reinforcing element in a transverse direction oriented transversely to the stroke axis, and/or is arranged between the reinforcing element and the dam arrangement in the transverse direction. 11. The method as claimed in claim 10 , wherein the dam arrangement and the support element delimit a receiving space with at least one filling volume in the receiving space, and the at least one filling volume is cast with a fluid and curable filling material. 12. The method as claimed in claim 11 , wherein the filling material is poured into the receiving space before and/or after the diaphragm material is cast or has been cast onto the reinforcing element. 13. The method as claimed in claim 4 , further comprising the steps of forming a pouring port in the support element, and wherein the reinforcing element and/or the dam arrangement are/is placed upon an auxiliary element and the diaphragm material and/or the filling material are/is poured through the pouring port from the direction of the support element. 14. The method as claimed in claim 13 , wherein the transducer unit is pivoted and/or vibrated during and/or after the pouring-in of the diaphragm material and/or the filling material, and/or that the diaphragm material and/or the filling material are/is cast under pressure.
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