FIG. 3 is an example of a cross-sectional view illustrating an operation of a temperature adjustment mechanism at the time of inspection. FIG. 4 is an example of a plan view illustrating an example of LED sections at the time of inspection. Also, in FIG. 3, the position of an electronic device 500 to be inspected is indicated by a broken line. Also, in FIG. 4, the position of the electronic device 500 to be inspected in plan view is shaded with dots. It should be noted that the electronic device 500 to be inspected may have a configuration for inspecting one chip or may have a configuration for inspecting a plurality of chips at the same time.

As illustrated in FIG. 4, the light emission mechanism 40 includes LED arrays 400 sectioned for respective predetermined areas. The LED arrays 400 are an example of light sources. FIG. 4 illustrates, as an example, 97 LED arrays 400. The LED array 400 for each section is represented by a square. Each LED array 400 is provided with a plurality of LEDs 41 (see FIG. 3). The control device 19 can control the lighting and the amount of light of the LEDs 41 for each of the LED arrays 400.