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Control method of inspection apparatus and inspection apparatus

專利號(hào)
US12075537B2
公開日期
2024-08-27
申請(qǐng)人
Tokyo Electron Limited(JP Tokyo)
發(fā)明人
Hiroaki Agawa
IPC分類
G01R31/28; H05B45/12; H05B45/40
技術(shù)領(lǐng)域
led,arrays,correction,correctors,wafer,c12,inspection,twelve,thermal,401a
地域: Tokyo

摘要

A control method of an inspection apparatus including a stage on which a substrate having an inspection object to be inspected is mounted and a plurality of light sources configured to emit light to heat the substrate includes: individually lighting the plurality of light sources and obtaining a plurality of first temperature distributions of the substrate; obtaining a second temperature distribution representing a sum of the plurality of first temperature distributions; obtaining one or more correction values for correcting an amount of light output from at least one or more light sources of the plurality of light sources based on the second temperature distribution; and correcting the amount of light output from each of the at least one or more light sources using the one or more correction values.

說明書

At the time of inspection, the control device lights one or more LED arrays 400 including the position of the electronic device 500 to be inspected and the LED arrays 400 surrounding the LED arrays 400 to emit light to the electronic device 500. Here, as an example, the electronic device 500 is present across the area of two LED arrays 400. Therefore, the LEDs 41 are lighted within an area 401 including a total of twelve LED arrays 400 of the two LED arrays 400 and ten LED arrays 400 surrounding the two LED arrays 400, and the light is emitted to the electronic device 500. It should be noted that, in the following, within the area 401, an area including the two LED arrays 400 where the electronic device 500 is present is referred to as a presence area 401A, which is indicated by a broken line in FIG. 4.

The tester 14 causes a current to pass through the electronic device 500 via the probe 16 to inspect the electronic device 500. It should be noted that, in FIG. 4, the area 401 of the LED arrays 400 that emit light is hatched. Also, in FIG. 3, the light emitted from the light emission mechanism 40 is illustrated by solid arrows B.

權(quán)利要求

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