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Control method of inspection apparatus and inspection apparatus

專利號
US12075537B2
公開日期
2024-08-27
申請人
Tokyo Electron Limited(JP Tokyo)
發(fā)明人
Hiroaki Agawa
IPC分類
G01R31/28; H05B45/12; H05B45/40
技術(shù)領(lǐng)域
led,arrays,correction,correctors,wafer,c12,inspection,twelve,thermal,401a
地域: Tokyo

摘要

A control method of an inspection apparatus including a stage on which a substrate having an inspection object to be inspected is mounted and a plurality of light sources configured to emit light to heat the substrate includes: individually lighting the plurality of light sources and obtaining a plurality of first temperature distributions of the substrate; obtaining a second temperature distribution representing a sum of the plurality of first temperature distributions; obtaining one or more correction values for correcting an amount of light output from at least one or more light sources of the plurality of light sources based on the second temperature distribution; and correcting the amount of light output from each of the at least one or more light sources using the one or more correction values.

說明書

Also, since the correction values C1 to C12 of the twelve correctors 19B are obtained by solving the optimization problem that minimizes the sum of squares of the difference between the sum of the temperatures in each pixel of the second thermal image and the predetermined temperature, the optimum correction values C1 to C12 can be obtained by calculation without actually trying various combinations of correction values C1 to C12. In other words, the correction values C1 to C12 that minimize the evaluation function V represented by the equation (2) can be easily and efficiently obtained.

Further, when the first temperature distributions are obtained, the twelve LED arrays 400 in the area 401 are lighted one by one (individually), and therefore the correction values at the time of lighting in response to a sudden heat generation of the electronic device 500 in a limited heating zone can be obtained.

Also, the correction values C1 to C12 are set such that the correction values C3 to C12 for the ten correctors 19B corresponding to the ten LED arrays 400 around the presence area 401A within the area 401 are greater than the correction values Cl and C2 for the two correctors 19B corresponding to the LED arrays 400 within the presence area 401A. Therefore, adjustment can be performed to decrease the temperature of the portion where the temperature tends to be high, such as the central portion of the area 401, and to increase the temperature of the portion where the temperature tends to be low, such as the surroundings, thereby achieving uniformity of the temperature distribution within the area 401.

權(quán)利要求

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