A control device 19 controls the operation of the stage 11. The control device 19 controls the movement mechanism (not illustrated) of the stage 11 to move the stage 11 in the horizontal direction and in the vertical direction. Also, the control device 19 is connected to the stage 11 by wiring 20. The control device 19 controls the operation of a light emission mechanism 40, which will be described later below, through the wiring 20. Further, the control device 19 is communicably connected to the tester 14, and information of the tester 14 is input to the control device 19.

A refrigerant supply device 21 is connected to a refrigerant flow path 31 of the stage 11 via a forward pipe 22 and a return pipe 23, and can circulate a refrigerant between the refrigerant supply device 21 and the refrigerant flow path 31 of the stage 11. The control device 19 controls the refrigerant supply device 21 to control the temperature, the flow rate, and the like of the refrigerant supplied from the refrigerant supply device 21 to the refrigerant flow path 31.

It should be noted that the control device 19 and the refrigerant supply device 21 are illustrated as being provided in the loader 13. However, the present disclosure is not limited thereto, and the control device 19 and the refrigerant supply device 21 may be provided at other positions.