During the period from timings t6 to t7, the selected word line WL transitions from the program voltage VPGM to the reference voltage VSS1, and the non-selected word line WL corresponding to the PLC transitions from the program pass voltage VPASS1 to the reference voltage VSS1, the non-selected word line WL corresponding to the QLC transitions from the program pass voltage VPASS2 to the reference voltage VSS1, and the selected drain side select gate line SGD transitions from the selected voltage VSGD to the reference voltage VSS2. As a result, the program operation to the memory cell MT is completed.
During the period from the timings t1 to t7, the source side select gate line SGS is maintained at the reference voltage VSS3.
Next, the program disturb and the VPASS disturb will be described with reference to