The third gate layer 1500 may include metal, an alloy, conductive metal oxide, a transparent conductive material, etc. For example, the third gate layer 1500 may include argentum (Ag), an alloy including argentum, molybdenum (Mo), an alloy including molybdenum, aluminum (Al), an alloy include aluminum, aluminum nitride (AlN), tungsten (W), tungsten nitride (WN), copper (Cu), nickel (Ni), chromium (Cr), chromium nitride (CrN), titanium (Ti), tantalum (Ta), platinum (Pt), scandium (Sc), indium tin oxide (ITO), indium zinc oxide (IZO), etc. The third gate layer 1500 may have a multi-layered structure, e.g., the third gate layer 1500 may include a double-layered structure including Mo/Al or a triple-layered structure including Mo/Al/Mo.
A second interlayer insulating layer 119 (see
A first connecting electrode layer 1600 as shown in