The upper separation regions SS may include a first upper separation region SS1 and a second upper separation region SS2, disposed between the first and second separation regions MS1 and MS2, where the second upper separation region SS2 may be between the first upper separation region SS1 and the second separation region MS2. In FIGS. 2 and 3, the upper separation regions SS are illustrated to include two (2) upper separation regions SS between the first and second separation regions MS1 and MS2, but are not limited thereto, and the number (e.g., quantity) of upper separation regions SS may be variously changed. As illustrated in FIG. 1, the upper separation regions SS may be disposed between the first and second separation regions MS1 and MS2, and may extend in the Y direction. Each of the upper separation regions SS may be arranged in a zigzag shape on a plan view. In some example embodiments, the upper separation regions SS may be arranged in a straight linear shape.
