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Semiconductor devices and data storage systems including the same

專利號(hào)
US12096637B2
公開日期
2024-09-17
申請(qǐng)人
Samsung Electronics Co., Ltd.(KR Gyeonggi-do)
發(fā)明人
Kohji Kanamori; Shinhwan Kang; Jeehoon Han
IPC分類
H10B43/50; H10B41/10; H10B41/27; H10B41/41; H10B41/50; H10B43/10; H10B43/27; H10B43/40
技術(shù)領(lǐng)域
separation,channel,may,vs3,structures,structure,upper,vertical,vs2,insulating
地域: Suwon-si

摘要

A semiconductor device includes a substrate; a stack structure on the substrate and including an alternating stack of interlayer insulating layers and gate electrodes; first and second separation regions each extending through the stack structure and extending in a first direction; a first upper separation region between the first and second separation regions and extending through a portion of the stack structure; a plurality of channel structures between the first and second separation regions and extending through the stack structure; and a plurality of first vertical structures each extending through a particular one of the first and second separation regions. Each of the first and second separation regions has a first width in a second direction that is perpendicular to the first direction. Each first vertical structure has a second width in the second direction, the second width being greater than the first width.

說(shuō)明書

In the first structure 1100F, the decoder circuit 1110 and the page buffer 1120 may perform a control operation on at least one selected memory cell transistor among the plurality of memory cell transistors MCT. The decoder circuit 1110 and the page buffer 1120 may be controlled by the logic circuit 1130. The semiconductor device 1100 may communicate with the controller 1200 through an input/output pad 1101 electrically connected to the logic circuit 1130. The input/output pad 1101 may be electrically connected to the logic circuit 1130 through input/output connection wirings 1135 extending from the first structure 1100F into the second structure 1100S.

The controller 1200 may include a processor 1210 (e.g., a central processing unit, or CPU), a NAND controller 1220, and a host interface 1230. According to some example embodiments, the data storage system 1000 may include a plurality of semiconductor devices 1100, and in this case, the controller 1200 may control the plurality of semiconductor devices 1100.

權(quán)利要求

1
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