Method for manufacturing vibrator, vibrator and vibrator device
地域：
Tokyo
摘要
A vibrator includes: a base portion; a vibrating arm including an arm portion which extends from the base portion, and a weight portion which is located on a tip end side of the arm portion and which has a first main surface and a second main surface that are in a front-back relationship; and a weight film disposed at the first main surface of the weight portion. The first main surface includes a planar surface and an inclined surface inclined with respect to the planar surface. A method for manufacturing a vibrator includes: a preparation step of preparing the above-described vibrator; and a removing step of removing a part of the weight film by emitting an energy ray to the weight film. In the removing step, the weight film disposed at the planar surface is removed and the weight film disposed at the inclined surface is not removed by emitting the energy ray to the weight film from a normal direction of the planar surface.
說明書
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The present application is based on, and claims priority from JP Application Serial Number 2020-112533, filed Jun. 30, 2020, the disclosure of which is hereby incorporated by reference herein in its entirety.
The present disclosure relates to a method for manufacturing a vibrator, a vibrator, and a vibrator device.
JP A-2019-128211 discloses a vibrator including: a base portion; a vibrating arm which extends from the base portion and includes an arm portion and a weight portion; and a weight film formed at the weight portion. Further, an upper surface of the weight portion has a projecting shape, and includes a first planar surface and second planar surfaces that are located on both sides of the first planar surface and that are located closer to a lower surface than is the first planar surface, and inclined surfaces that couple the first planar surface and the second planar surfaces. Then, the weight film is formed to cross the first planar surface, the second planar surfaces, and the inclined surfaces. In such a vibrator, a frequency of the vibrator can be adjusted by irradiating a weight film with a laser beam to remove a part of the weight film.
權(quán)利要求
What is claimed is:1. A vibrator, comprising:a base portion; a vibrating arm including an arm portion which extends from the base portion, and a weight portion which is located on a tip end side of the arm portion and which has a first main surface and a second main surface that are in a front-back relationship; and a weight film disposed at the first main surface of the weight portion, wherein the first main surface includes a planar surface and an inclined surface inclined with respect to the planar surface, a part of the weight film is removed to form a processing mark recessed in a thickness direction of the vibrating arm, and the processing mark is not formed on the weight film disposed at the inclined surface, but is formed on the weight film disposed at the planar surface. 2. The vibrator according to claim 1 , whereinthe planar surface includes:a first planar surface, and a second planar surface which is coupled to the first planar surface via the inclined surface, is located closer to the second main surface than is the first planar surface, and is parallel to the first planar surface. 3. The vibrator according to claim 2 , whereinthe processing mark is not formed on the weight film disposed at the second planar surface, but is formed on the weight film disposed at the first planar surface. 4. The vibrator according to claim 2 , whereinin a plan view, the second planar surface is disposed on both sides of the first planar surface in a width direction orthogonal to an extending direction of the arm portion. 5. The vibrator according to claim 2 , whereinin a plan view, the first planar surface is disposed on both sides of the second planar surface in a width direction orthogonal to an extending direction of the arm portion. 6. A vibrator device, comprising:the vibrator according to claim 1 ; and a package which houses the vibrator. 7. A method for manufacturing a vibrator, comprising:a preparation step of preparing a vibrator, the vibrator including:a base portion; a vibrating arm including an arm portion which extends from the base portion, and a weight portion which is located on a tip end side of the arm portion and which has a first main surface and a second main surface that are in a front-back relationship; and a weight film disposed at the first main surface of the weight portion, the first main surface including a planar surface and an inclined surface inclined with respect to the planar surface; and a removing step of removing a part of the weight film by emitting an energy ray to the weight film, wherein in the removing step, the weight film disposed at the planar surface is removed and the weight film disposed at the inclined surface is not removed by emitting the energy ray to the weight film from a normal direction of the planar surface. 8. The method for manufacturing a vibrator according to claim 7 , whereinthe planar surface includes:a first planar surface, and a second planar surface which is coupled to the first planar surface via the inclined surface, is located closer to the second main surface than is the first planar surface, and is parallel to the first planar surface. 9. The method for manufacturing a vibrator according to claim 8 , whereinin the removing step, the weight film disposed at the first planar surface is removed and the weight film disposed at the second planar surface is not removed by emitting the energy ray to the weight film. 10. The method for manufacturing a vibrator according to claim 8 , whereinin a plan view, the second planar surface is disposed on both sides of the first planar surface in a width direction orthogonal to an extending direction of the arm portion. 11. The method for manufacturing a vibrator according to claim 8 , whereinin a plan view, the first planar surface is disposed on both sides of the second planar surface in a width direction orthogonal to an extending direction of the arm portion.
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