Method for manufacturing vibrator, vibrator and vibrator device
摘要
說(shuō)明書(shū)
The drive signal electrodes 41 are disposed at both side surfaces of the arm portion 261, both side surfaces of the arm portion 271, the upper and lower surfaces of the arm portion 281, and the upper and lower surfaces of the arm portion 291. On the other hand, the drive ground electrodes 42 are disposed at the upper and lower surfaces of the arm portion 261, the upper and lower surfaces of the arm portion 271, both side surfaces of the arm portion 281, and both side surfaces of the arm portion 291. Further, the first detection signal electrodes 43 are disposed at the upper and lower surfaces of the arm portion 221, and the first detection ground electrodes 44 are disposed at both side surfaces of the arm portion 221. On the other hand, the second detection signal electrodes 45 are disposed at the upper and lower surfaces of the arm portion 231, and the second detection ground electrodes 46 are disposed at both side surfaces of the arm portion 231. Although not shown, each of these electrodes 41 to 46 is routed back to the lower surface of the base portion 21 and electrically coupled to the corresponding one of the plurality of leads 82.
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