Method for manufacturing vibrator, vibrator and vibrator device
摘要
說明書
Further, the thin portions 266, 267 are disposed on and biased to the lower surface 264 side. Then, on the lower surface 264 side, the thick portion 265, the thin portion 266, 267, and the inclined portions 268, 269 are continuously coupled without a step. Therefore, the lower surface 264 of the weight portion 262 is a planar surface in the X-Y plane. On the other hand, on the upper surface 263 side, steps formed by the inclined portions 268, 269 are formed between the thick portion 265 and the thin portions 266, 267. Therefore, the upper surface 263 of the weight portion 262 has a projecting shape. Accordingly, since the thin portions 266, 267 are biased toward the lower surface 264, a center of gravity G1 of the weight portion 262 is located on the lower surface 264 side with respect to a central plane CP which is the X-Y plane intersecting a center C in the thickness direction of the drive arm 26.
