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Magnetic storage device

專利號(hào)
US12133472B2
公開(kāi)日期
2024-10-29
申請(qǐng)人
KIOXIA CORPORATION(JP Tokyo)
發(fā)明人
Katsuhiko Koui; Masaru Toko; Soichi Oikawa; Hideyuki Sugiyama
IPC分類
H10N50/80; H01F10/32; H10B61/00; H10N50/10; H10N50/85
技術(shù)領(lǐng)域
layer,43b,43a,spin,ku,diffusion,conductive,magnetic,preventing,in
地域: Tokyo

摘要

A magnetic storage device includes a magnetoresistance effect element including a first magnetic layer having a variable magnetization direction, a second magnetic layer having a fixed magnetization direction, and a non-magnetic layer between the first and second magnetic layers. The first magnetic layer includes a first layer that is magnetic, a second layer that is magnetic and farther from the non-magnetic layer than the first layer, and a third layer between the first and second layers. The third layer includes a first portion formed of an insulating material or a semiconductor material and a plurality of second portions surrounded by the first portion and formed of a conductive material.

說(shuō)明書

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

The magnetoresistance effect element 100 illustrated in FIG. 1 has a “top free-type” structure in which the storage layer 40 is positioned on an upper layer side, and the reference layer 20 is positioned on a lower layer side. However, the magnetoresistance effect element 100 may have a “bottom free-type” structure in which the storage layer 40 is positioned on the lower layer side, and the reference layer 20 is positioned on the upper layer side.

Next, an example of a method for forming the functional layer 43 will be described.

On the interface layer 41, an alloy layer of a selected element of the oxide used in the spin diffusion preventing layer 43a and a magnetic metal element constituting the conductive portions 43b is formed. Subsequently, oxygen is introduced into a chamber wherein the alloy layer has been formed, resulting in oxidation, and a heat treatment is further performed. By such a method, the functional layer 43 having a structure in which a plurality of the conductive portions 43b are surrounded by the spin diffusion preventing layer 43a can be formed.

That is, the energy of formation of the oxide of the selected element is less than the energy of formation of the oxide of the magnetic metal element. Therefore, the spin diffusion preventing layer 43a and the conductive portions 43b can be formed by self-assembly.

權(quán)利要求

1
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