白丝美女被狂躁免费视频网站,500av导航大全精品,yw.193.cnc爆乳尤物未满,97se亚洲综合色区,аⅴ天堂中文在线网官网

Semiconductor memory device and fabrication method thereof

專利號(hào)
US12133479B2
公開日期
2024-10-29
申請(qǐng)人
UNITED MICROELECTRONICS CORP.(TW Hsin-Chu)
發(fā)明人
Chia-Ching Hsu
IPC分類
H01L45/00; H10N70/00; H10N70/20
技術(shù)領(lǐng)域
layer,dielectric,electrode,top,te,in,metal,teu,resistive,conductive
地域: Hsin-Chu

摘要

A semiconductor memory device includes a substrate, a first dielectric layer on the substrate, a bottom electrode on the first dielectric layer, a second dielectric layer on the first dielectric layer, and a top electrode in the second dielectric layer. The top electrode has a lower portion around the bottom electrode and a tapered upper portion. A third dielectric layer is disposed above the bottom electrode and around the tapered upper portion of the top electrode. A resistive-switching layer is disposed between a sidewall of the bottom electrode and a sidewall of the lower portion of the top electrode and between the third dielectric layer and a sidewall of the tapered upper portion of the top electrode. An air gap is disposed in the third dielectric layer.

說明書

Please refer to FIG. 1 and FIG. 2. FIG. 1 is a top view of a part of a semiconductor memory device according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along the line I-I′ in FIG. 1. As shown in FIG. 1 and FIG. 2, the semiconductor memory device 1 includes a substrate 100, such as a semiconductor substrate, but is not limited thereto. The substrate 100 may include a memory array area MA and a logic circuit area LA. The semiconductor memory device 1 further includes a first dielectric layer 110 on the substrate 100 and covering the memory array area MA and the logic circuit area LA. According to an embodiment of the present invention, the first dielectric layer 110 may include a silicon oxide layer, but is not limited thereto. According to an embodiment of the present invention, a metal layer 112, such as a copper metal layer, but is not limited thereto, may be formed in the first dielectric layer 110. According to the embodiment of the present invention, for example, the metal layer 112 may be the third metal layer (M3) in the metal interconnection structure, but is not limited thereto. According to an embodiment of the present invention, a dielectric barrier layer BL, such as a silicon nitride layer, may be formed on the first dielectric layer 110. A plurality of openings BLO may be formed in the dielectric barrier layer BL, which respectively expose the top surfaces of the corresponding metal layers 112.

權(quán)利要求

1
微信群二維碼
意見反饋