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Bit line structure, manufacturing method thereof and semiconductor memory

專利號(hào)
US12150293B2
公開日期
2024-11-19
申請(qǐng)人
CHANGXIN MEMORY TECHNOLOGIES, INC.(CN Hefei)
發(fā)明人
ChihCheng Liu
IPC分類
H01L27/108; H10B12/00
技術(shù)領(lǐng)域
bit,line,contact,structure,in,lines,array,first,second,structures
地域: Hefei

摘要

A bit line structure, a manufacturing method thereof, and a semiconductor memory are provided. The bit line structure includes a first bit line array and a second bit line array. The first bit line array includes a plurality of first bit lines extending in a Y direction. The plurality of first bit lines have a same length and are aligned and arranged in an X direction. The second bit line array includes a plurality of second bit lines extending in the Y direction. The plurality of second bit lines have a same length and are aligned and arranged in the X direction. The first bit line array and the second bit line array are not aligned in the X direction. The X direction is perpendicular to the Y direction.

說明書

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The semiconductor memory of the present embodiment is based on the first bit line array 100 and the second bit line array 200 which are not aligned in the X direction. The cross-sectional areas of the first bit line contact structure 111 and the second bit line contact structure 211 are enlarged by providing a larger arrangement space in a horizontal plane for the first bit line contact structure 111 and the second bit line contact structure 211. Therefore, the contact resistance between the first bit line contact structure 111 and the corresponding bit line and the contact resistance between the second bit line contact structure 211 and the corresponding bit line are reduced, and the sensing margin and the charge-discharge speed of the semiconductor memory are improved.

In the description of the disclosure, it is understood that the terms “upper”, “l(fā)ower”, “vertical”, “horizontal”, “inner”, “outer”, etc. indicate orientations or positional relationships based on that shown in the drawings. They are merely intended to facilitate describing the disclosure and to simplify the description rather than indicating or implying that the referenced device or element must have a particular orientation and be constructed and operated in a particular orientation, and are thus not to be construed as limiting the disclosure.

The technical features of the above-described embodiments may be combined arbitrarily. In order to simplify the description, all possible combinations of the technical features in the above embodiments are not described. However, as long as there is no conflict between these technical features, they should be considered to be within the scope of this specification.

權(quán)利要求

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