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Highly stable chip-scale atomic beam clocks using miniaturized atomic beams and monolithic clock chips

專利號
US12160242B1
公開日期
2024-12-03
申請人
HRL Laboratories, LLC(US CA Malibu)
發(fā)明人
Travis Autry; Raviv Perahia
IPC分類
H03L7/26; G04F5/14; H01S5/00; H01S5/02325; H01S5/02375; H01S5/183
技術(shù)領(lǐng)域
atomic,beam,clock,chip,in,scale,adev,bench,photon,atom
地域: CA CA Malibu

摘要

A low-power, chip-scale atomic beam clock is provided that maintains high precision for at least one week at any practical temperature. In some variations, the invention provides a chip-scale atomic beam clock comprising: a micro-optical bench; an atom collimator configured to generate a collimated atomic beam via differential pumping through microchannels; a VCSEL configured to emit laser photons horizontally in the plane of the micro-optical bench; an in-plane lithographically defined diffraction grating configured to split the laser photons into a first photon beam and a second photon beam; in-plane lithographically defined mirrors configured to retroflect the photon beams; in-plane photodetectors configured to detect the photon beams after being retroflected, wherein the first photon beam and the second photon beam interrogate the collimated atomic beam in-plane with the micro-optical bench. The chip-scale atomic beam clocks is capable of maintaining precise positioning, navigation, and timing in case of GPS denial or failure.

說明書

FIG. 4 is an exemplary diagram depicting the assembly and fabrication process for making a wafer-scale clock chip, in various embodiments. The process begins by predefining metal layers on the two halves of the glass sandwich, machining the inner surfaces, and fusion bonding the wafers together (step 1). Separately, a silicon-on-insulator stack is formed with a device layer (e.g., a 200-μm layer) and a pre-fabricated handle with TSVs and RDLs (step 2). Si optical elements are etched into the device layer and release holes are etched into the surrounding area (step 3). Those release holes allow for releasing the Si surrounding the optical elements by removing the oxide layer using wet etching (step 4). The sides of the Si optical elements are then metalized, to increase reflectivity, using a shadow mask to avoid TSV and bond surfaces (step 5). Similarly, an evaporable getter is evaporated on the Si handle wafer surface, in step 5. Next, the MEMS mirrors are wire-bonded to TSVs; and the VCSEL assembly, photodiodes, and graphite NEG are die-bonded to the RDL on the handle wafer (step 6). The clock chip is completed by wafer-level bonding the glass atom tube structure to the Si handle wafer using Au—Au bonding (step 7). Finally, the photo-diode is attached to the top of the clock chip, and the Helmholtz coils are wire-bonded (step 8). All references in this paragraph to specific dimensions and materials are for purposes of illustrating this drawing only, and should be understood in the context of the entire specification.

權(quán)利要求

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