The white area on the lower side of FIG. 26 is the LaAlO3 single crystal substrate, and the region in which a slightly black striped pattern appears is the YBCO conductor. The film thickness of the YBCO superconductor is scaled, the thin portion is 223 nm and the thick portion is 301 nm. From the film thickness difference, it can be seen that the sample was formed almost according to the conditions. Although it is difficult to see from FIG. 26, all the striped patterns run in the direction parallel to the substrate. In other words, it shows that the c axis oriented particles are aligned.
FIG. 27 illustrates a TEM image in which the boundary between the LaAlO3 single crystal substrate and the YBCO superconductor in FIG. 26 was observed at a high magnification of 2.17 million times. Each element of the LaAlO3 single crystal substrate can be seen at the bottom of the figure, and the region visible in the lateral stripe pattern is the c axis oriented particle of the YBCO superconductor. As can be seen from FIG. 27, c-axis oriented particles are formed on almost the entire surface, and a portion where stripes are slightly connected in the vertical direction can be seen on the left end of the figure, which is the a/b-axis oriented particle.
