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Magnetic random access memory and manufacturing method thereof

專利號
US12178051B2
公開日期
2024-12-24
申請人
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.(TW Hsinchu)
發(fā)明人
Hui-Hsien Wei; Chung-Te Lin; Han-Ting Tsai; Tai-Yen Peng; Yu-Teng Dai; Chien-Min Lee; Sheng-Chih Lai; Wei-Chih Wen
IPC分類
H10B61/00; B82Y25/00; G11C11/16; H01F41/30; H10N50/01; H10N50/10; H10N50/80; H10N50/85
技術領域
layer,insulating,mtj,mram,ild,cover,in,electrode,nm,dielectric
地域: Hsinchu

摘要

In a method of manufacturing a semiconductor device, a magnetic random access memory (MRAM) cell structure is formed. The MRAM cell structure includes a bottom electrode, a magnetic tunnel junction (MTJ) stack and a top electrode. A first insulating cover layer is formed over the MRAM cell structure. A second insulating cover layer is formed over the first insulating cover layer. An interlayer dielectric (ILD) layer is formed. A contact opening in the ILD layer is formed, thereby exposing the second insulating cover layer. A part of the second insulating cover layer and a part of the first insulating cover layer are removed, thereby exposing the top electrode. A conductive layer is formed in the opening contacting the top electrode.

說明書

If the same current value IC is forced to flow through the MTJ cell by the current source 30, it is found that the cell voltage V1 in the case of FIG. 3A (or FIG. 3C) is larger than the cell voltage V2 in the case of FIG. 3B (or FIG. 3D), because the resistance of an opposite-oriented MTJ cell shown in FIG. 3A (or FIG. 3C) is greater than the resistance of a same-oriented MTJ cell shown in FIG. 3B (or FIG. 3D). Binary logic data (“0” and “1”) can be stored in a MTJ cell and retrieved based on the cell orientation and resulting resistance. Further, since the stored data does not require a storage energy source, the cell is non-volatile.

FIG. 4A shows a schematic circuit diagram of an MTJ MRAM array 50. Each memory cell includes a MTJ cell Mc and a transistor Tr, such as a MOS FET. The gate of the transistor Tr is coupled to one of word lines WL1 . . . WLm and a drain (or a source) of the transistor Tr is coupled to one end of the MTJ cell Mc, and another end of the MTJ cell is coupled to one of bit lines BLn, BLn+1 and BLn+2. Further, in some embodiments, signal lines (not shown) for programming are provided adjacent to the MTJ cells.

權利要求

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