白丝美女被狂躁免费视频网站,500av导航大全精品,yw.193.cnc爆乳尤物未满,97se亚洲综合色区,аⅴ天堂中文在线网官网

Magnetic random access memory and manufacturing method thereof

專利號(hào)
US12178051B2
公開日期
2024-12-24
申請(qǐng)人
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.(TW Hsinchu)
發(fā)明人
Hui-Hsien Wei; Chung-Te Lin; Han-Ting Tsai; Tai-Yen Peng; Yu-Teng Dai; Chien-Min Lee; Sheng-Chih Lai; Wei-Chih Wen
IPC分類
H10B61/00; B82Y25/00; G11C11/16; H01F41/30; H10N50/01; H10N50/10; H10N50/80; H10N50/85
技術(shù)領(lǐng)域
layer,insulating,mtj,mram,ild,cover,in,electrode,nm,dielectric
地域: Hsinchu

摘要

In a method of manufacturing a semiconductor device, a magnetic random access memory (MRAM) cell structure is formed. The MRAM cell structure includes a bottom electrode, a magnetic tunnel junction (MTJ) stack and a top electrode. A first insulating cover layer is formed over the MRAM cell structure. A second insulating cover layer is formed over the first insulating cover layer. An interlayer dielectric (ILD) layer is formed. A contact opening in the ILD layer is formed, thereby exposing the second insulating cover layer. A part of the second insulating cover layer and a part of the first insulating cover layer are removed, thereby exposing the top electrode. A conductive layer is formed in the opening contacting the top electrode.

說明書

A memory cell is read by asserting the word line of that cell, forcing a reading current through the bit line of that cell, and then measuring the voltage on that bit line. For example, to read the state of a target MTJ cell, the word line is asserted to turn ON the transistor Tr. The free magnetic layer of the target MTJ cell is thereby coupled to one of the fixed potential lines SLn, SLn+1 and SLn+2, e.g., the ground, through the transistor Tr. Next, the reading current is forced on the bit line. Since only the given reading transistor Tr is turned ON, the reading current flows through the target MTJ cell to the ground. The voltage of the bit line then measured to determine the state (“0” or “1”) of the target MTJ cell. In some embodiments, as shown in FIG. 4A, each MTJ cell has one reading transistor Tr. Therefore, this type of MRAM architecture is called 1T1R. In other embodiments, two transistors are assigned to one MTJ cell, forming a 2T1R system. Other cell array configurations can be employed.

FIG. 4B shows a schematic perspective view of a memory cell of the MTJ MRAM and FIG. 4C shows a memory cell layout of the MTJ MRAM.

權(quán)利要求

1
微信群二維碼
意見反饋