The fifth region 445 of the fifth active layer 440 is disposed on a part of the upper surface of the second insulating layer 402 and one side surface of each of the first and second insulating layers 401 and 402 in a region in which the eighth hole H8 is provided.
The sixth region 446 of the fifth active layer 440 may extend from the fifth region 445 and may be in contact with the upper surface of the fifth electrode 421 exposed through the eighth hole H8.
The seventh region 447 of the fifth active layer 440 may extend from the sixth region 446 to a part of the upper surface of the second insulating layer 402 and may be disposed on the other side surface of each of the first and second insulating layers 401 and 402 in the region in which the eighth hole H8 is provided.
The eighth region 448 of the fifth active layer 440 may be a part extending from the seventh region 447, disposed on a part of the upper surface of the second insulating layer 402, and made conductive. In other words, the eighth region 448 of the fifth active layer 440 may have a higher electrical conductivity than the fifth to seventh regions 445 to 447 of the fifth active layer 440.
The eighth region 448 of the fifth active layer 440 may be in contact with a part of the upper surface of the first conductive layer 450 through a ninth hole H9 provided in the second insulating layer 402.