The third active layer material 170a may extend from a part of the upper surface of the fifth insulating layer 205 to be disposed in the fifth hole H5, may extend from the region disposed in the fifth hole H5 to the upper surface of the fifth insulating layer 205 to be disposed in the sixth hole H6, and may be formed to extend from the region disposed in the sixth hole H6 to a part of the upper surface of the fifth insulating layer 205.
The third active layer material 170a may be formed through MOCVD or ALD so as to be formed in the fifth hole H5 and the sixth hole H6 having small widths without disconnection.
Subsequently, as shown in FIG. 24, a first protection layer material 307a may be formed on the substrate 100 on which the third active layer material 170a is formed.
Then, as shown in FIG. 25, the first protection layer material 307a is patterned into the first protection layer 307 disposed on a part of the upper surface of the third active layer 170 through a dry etching process. Also, a third conductive layer material may be formed on the first protection layer material 307a. The first protection layer material 307a and the third conductive layer material may be etched through the same process so that the first protection layer 307 and the third conductive layer 180 may be formed, but the present disclosure is not limited thereto.