FIG. 8 is a cross-sectional view schematically illustrating an actual embodiment of the analysis EL layer provided to the analysis element.

FIG. 9 is an enlarged view of a modification of the portion A in the illustration (b) of FIG. 1 with the sealing layer removed.

FIG. 10 is a schematic view illustrating a configuration of a time-of-flight secondary ion mass spectrometry (TOF-SIMS) analyzer analyzing the analysis element.

FIG. 11 illustrations (a) to (c) of FIG. 11 are schematic views showing a sequence of an analysis carried out with the TOF-SIMS analyzer.

FIG. 12 An illustration (a) of FIG. 12 is a cross-sectional view of an analysis element according to a comparative example, and an illustration (b) of FIG. 12 is a cross-sectional view of the analysis element during a defect analysis.

FIG. 13 An illustration (a) of FIG. 13 is a graph showing a result of the analysis of the analysis element according to the embodiment, the analysis being carried out with the TOF-SIMS analyzer, and an illustration (b) of FIG. 13 is a graph showing a result of the analysis of the analysis element according to the comparative example, the analysis being carried out with the TOF-SIMS analyzer.