Photoelectric conversion element and imaging device
摘要
說明書
The transfer transistor Tr3 (a transfer transistor TR3trs) transfers, to the floating diffusion FD3, signal electric charges corresponding to red generated and accumulated in the inorganic photoelectric converter 32R, and includes, for example, a MOS transistor. In addition, the transfer transistor TR3trs is coupled to a transfer gate line TG3. Further, the floating diffusion FD3 is provided in a region 38C in proximity to the gate Gtrs3 of the transfer transistor TR3trs. Electric charges accumulated in the inorganic photoelectric converter 32R are read by the floating diffusion FD3 via a transfer channel formed along the gate Gtrs3.
A reset transistor TR2rst, an amplifier transistor TR2amp, and a selection transistor TR2sel that are included in a controller of the inorganic photoelectric converter 32G are further provided on the second surface (the surface 30S2) side of the semiconductor substrate 30. In addition, a reset transistor TR3rst, an amplifier transistor TR3amp, and a selection transistor TR3sel that are included in a controller of the inorganic photoelectric converter 32R are provided.
The reset transistor TR2rst includes a gate, a channel formation region, and source/drain regions. The gate of the reset transistor TR2rst is coupled to a reset line RST2, and one source drain region of the reset transistor TR2rst is coupled to the power source VDD. Another source/drain region of the reset transistor TR2rst also serves as the floating diffusion FD2.
