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Method for manufacturing a semiconductor storage device including a division film

專利號
US12185539B2
公開日期
2024-12-31
申請人
Kioxia Corporation(JP Tokyo)
發(fā)明人
Kazuharu Yamabe; Yoshiro Shimojo
IPC分類
H10B43/27
技術(shù)領(lǐng)域
columnar,film,insulating,sgdo,cl2a,cl2b,body,stacked,conductive,bodies
地域: Tokyo

摘要

In a method for manufacturing a memory, a first stacked body is formed by stacking a first insulating film and a first sacrificial film. A first columnar body including a first semiconductor portion extending in the first stacked body in the first direction and a charge trapping film provided on an outer peripheral surface of the first semiconductor portion is formed. A second columnar body provided in a second direction of the first columnar body and including a second semiconductor portion stretching in the first stacked body in the first direction and a charge trapping film on an outer peripheral surface of the second semiconductor portion is formed. A second insulating film is formed above the first stacked body. A third columnar body including a third semiconductor portion provided on both the first columnar body and the second columnar body and stretching in the second insulating film in the first direction and a first gate insulating film provided on an outer peripheral surface of the third semiconductor portion is formed. A first division insulating film extending in the first direction and a third direction intersecting the first direction and the second direction and dividing the third semiconductor portion of the third columnar body in the second direction is formed.

說明書

The base portion 4 is provided below the first stacked body 1 and includes a substrate 40, a base insulating film 41, a base conductive film 42, and a base semiconductor portion 43. The substrate 40 has a first surface and a second surface that are substantially perpendicular to the Z direction, which is the stacking direction. The base insulating film 41 is provided on the first surface of the substrate 40. The base conductive film 42 is provided on the base insulating film 41. The base semiconductor portion 43 is provided on the base conductive film 42. The substrate 40 is configured with a semiconductor substrate, and may be, for example, a p-type silicon substrate. For example, an element division region 40i is provided on the surface region of the substrate 40. The element division region 40i is, for example, an insulating region containing silicon oxide, and an active area aa is partitioned on the surface region of the substrate 40. The source and drain regions of a transistor Tr are provided in the active area aa. The transistor Tr configures a peripheral circuit of the non-volatile memory. The base insulating film 41 contains, for example, a silicon oxide and insulates the transistor Tr. A wiring 41a is provided in the base insulating film 41. The wiring 41a is a wiring electrically connected to the transistor Tr. For example, a conductive metal such as tungsten is used for the base conductive film 42. For example, a semiconductor material such as n-type silicon is used for the base semiconductor portion 43. Undoped silicon may be used for a portion of the base semiconductor portion 43. The base conductive film 42 and the base semiconductor portion 43 integrally function as a common source line BSL of the memory cell array.

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