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Dielectric barrier plasma generator and plasma discharge starting method for dielectric barrier plasma generator

專利號
US12219688B2
公開日期
2025-02-04
申請人
Ushio Denki Kabushiki Kaisha（JP Tokyo）
發(fā)明人
Takahiro Hiraoka; Kensuke Nakamura; Takanori Samejima
IPC分類
H05H1/00; H05H1/24
技術領域
blowout,plasma,dielectric,electrode,voltage,outlet,gas,generator,substrate,in
地域： Tokyo

摘要

A dielectric barrier plasma generator includes: a dielectric substrate, a high-voltage electrode provided on a first surface of the dielectric substrate, a low-voltage electrode provided to face a second surface of the dielectric substrate, a power introduction section provided at a first end of the high-voltage electrode, a gas channel formed from a first end to a second end thereof between the dielectric substrate and the low-voltage electrode to allow gas to flow from the first end of the gas channel to the second end thereof, and a blowout outlet formed at the second end of the gas channel to blow out the gas that has flown through the gas channel and plasma that has been generated in the gas channel. The dielectric substrate includes a portion having a thickness being thinner when being closer to the blowout outlet.

說明書

In the plasma discharge starting method of the present invention, the plasma is generated by introducing at least one type of starting gas selected from the group consisting of He, Ne, and Ar into the gas channel to generate plasma at the time of starting. After the starting, the gas for generating plasma is introduced into the gas channel. Hence, this method is capable of starting discharge even though the gas for generating plasma is a gas that is less likely to undergo plasma discharge.

Advantageous Effects of Invention

The present invention provides a dielectric barrier plasma generator capable of efficiently and uniformly ejecting plasma from the entire region of the blowout outlet. The present invention also provides a plasma discharge starting method of the dielectric barrier plasma generator.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a perspective view schematically illustrating a dielectric barrier plasma generator according to a first embodiment.

FIG. 2 is a cross-sectional view of the dielectric barrier plasma generator taken along the line A-A shown in FIG. 1.

FIG. 3 is a cross-sectional view of the dielectric barrier plasma generator taken along a line orthogonal to the line A-A shown in FIG. 1.

FIG. 4 is a plan view of a low-voltage electrode of the dielectric barrier plasma generator shown in FIG. 1.

權利要求

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