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Dielectric barrier plasma generator and plasma discharge starting method for dielectric barrier plasma generator

專利號
US12219688B2
公開日期
2025-02-04
申請人
Ushio Denki Kabushiki Kaisha(JP Tokyo)
發(fā)明人
Takahiro Hiraoka; Kensuke Nakamura; Takanori Samejima
IPC分類
H05H1/00; H05H1/24
技術(shù)領(lǐng)域
blowout,plasma,dielectric,electrode,voltage,outlet,gas,generator,substrate,in
地域: Tokyo

摘要

A dielectric barrier plasma generator includes: a dielectric substrate, a high-voltage electrode provided on a first surface of the dielectric substrate, a low-voltage electrode provided to face a second surface of the dielectric substrate, a power introduction section provided at a first end of the high-voltage electrode, a gas channel formed from a first end to a second end thereof between the dielectric substrate and the low-voltage electrode to allow gas to flow from the first end of the gas channel to the second end thereof, and a blowout outlet formed at the second end of the gas channel to blow out the gas that has flown through the gas channel and plasma that has been generated in the gas channel. The dielectric substrate includes a portion having a thickness being thinner when being closer to the blowout outlet.

說明書

FIG. 5 is a plan view in which polypropylene (PP) films as objects to be irradiated are placed on a stage at predetermined intervals.

FIG. 6 is a graph that indicates the measurement results of the water contact angle.

FIG. 7 is a partial cross-sectional view illustrating a variation example 1 of the dielectric barrier plasma generator according to the first embodiment.

FIG. 8 is a partial cross-sectional view illustrating a variation example 2 of the dielectric barrier plasma generator according to the first embodiment.

FIG. 9 is a partial cross-sectional view illustrating a variation example 3 of the dielectric barrier plasma generator according to the first embodiment.

FIG. 10 is a partial cross-sectional view illustrating a variation example 4 of the dielectric barrier plasma generator according to the first embodiment.

FIG. 11 is a cross-sectional view illustrating a variation example 5 according to the first embodiment.

FIG. 12 is a cross-sectional view of a dielectric barrier plasma generator according to a second embodiment.

FIG. 13 is a cross-sectional view of a dielectric barrier plasma generator according to a third embodiment.

FIG. 14 is a perspective view of a dielectric barrier plasma generator according to a fourth embodiment.

權(quán)利要求

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