FIG. 15 is a cross-sectional view of the dielectric barrier plasma generator taken along the line A-A shown in FIG. 14.
FIG. 16 is a cross-sectional view of a dielectric barrier plasma generator according to a fifth embodiment.
FIG. 17 is a cross-sectional view of a dielectric barrier plasma generator according to a sixth embodiment.
FIG. 18 is a perspective view schematically illustrating a conventional dielectric barrier plasma generator.
DESCRIPTION OF EMBODIMENTS
Hereinafter, embodiments of a dielectric barrier plasma generator according to the present embodiment will be described with reference to the drawings.
First Embodiment