Dielectric barrier plasma generator and plasma discharge starting method for dielectric barrier plasma generator
地域：
Tokyo
摘要
A dielectric barrier plasma generator includes: a dielectric substrate, a high-voltage electrode provided on a first surface of the dielectric substrate, a low-voltage electrode provided to face a second surface of the dielectric substrate, a power introduction section provided at a first end of the high-voltage electrode, a gas channel formed from a first end to a second end thereof between the dielectric substrate and the low-voltage electrode to allow gas to flow from the first end of the gas channel to the second end thereof, and a blowout outlet formed at the second end of the gas channel to blow out the gas that has flown through the gas channel and plasma that has been generated in the gas channel. The dielectric substrate includes a portion having a thickness being thinner when being closer to the blowout outlet.
說明書
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The dielectric substrate 12 is preferably made of a material having a low relative permittivity from a viewpoint of generating a larger amount of plasma per unit power. The relative permittivity of the material is preferably 10 or less. When a lower limit of the relative permittivity of the material is lower, it is more preferable; for example, it can be 4 or more.
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