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Dielectric barrier plasma generator and plasma discharge starting method for dielectric barrier plasma generator

專利號
US12219688B2
公開日期
2025-02-04
申請人
Ushio Denki Kabushiki Kaisha(JP Tokyo)
發(fā)明人
Takahiro Hiraoka; Kensuke Nakamura; Takanori Samejima
IPC分類
H05H1/00; H05H1/24
技術(shù)領(lǐng)域
blowout,plasma,dielectric,electrode,voltage,outlet,gas,generator,substrate,in
地域: Tokyo

摘要

A dielectric barrier plasma generator includes: a dielectric substrate, a high-voltage electrode provided on a first surface of the dielectric substrate, a low-voltage electrode provided to face a second surface of the dielectric substrate, a power introduction section provided at a first end of the high-voltage electrode, a gas channel formed from a first end to a second end thereof between the dielectric substrate and the low-voltage electrode to allow gas to flow from the first end of the gas channel to the second end thereof, and a blowout outlet formed at the second end of the gas channel to blow out the gas that has flown through the gas channel and plasma that has been generated in the gas channel. The dielectric substrate includes a portion having a thickness being thinner when being closer to the blowout outlet.

說明書

In the vicinity of the blowout outlet 30, direct discharge may occur between the high-voltage electrode 14 and the low-voltage electrode 20 without passing through the dielectric substrate 12. Such discharge damages the high-voltage electrode 14, dielectric substrate 12, and low-voltage electrode 20, thereby causing the materials constituting these components to mix into the plasma as impurities. From a standpoint of discharge efficiency, it is advantageous to mount the high-voltage electrode at the front edge of the blowout outlet. However, this configuration allows the distance between the high-voltage electrode and the low-voltage electrode to become significantly shorter, causing creeping discharge on the dielectric substrate. Once the discharge occurs, it does not form dielectric barrier discharge, but moves on to direct discharge, thus an excessive discharge current flows, thus an excessive discharge current flows, causing damage to the electrodes and eventually damage to the power supply unit. Hence, the plasma generator 10 has the configuration in which the predetermined clearance 15 is provided between the second end of the high-voltage electrode 14 and the surface on which the blowout outlet 30 is formed. This configuration prevents the direct discharge between the high-voltage electrode 14 and the low-voltage electrode 20, and enables the discharge between the high-voltage electrode 14 and the low-voltage electrode 20 through the dielectric substrate 12, thereby preventing damage to the high-voltage electrode 14, dielectric substrate 12, and low-voltage electrode 20. The clearance 15 may preferably be, for example, in the range of 1 to 5 mm.

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