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Dielectric barrier plasma generator and plasma discharge starting method for dielectric barrier plasma generator

專利號(hào)
US12219688B2
公開(kāi)日期
2025-02-04
申請(qǐng)人
Ushio Denki Kabushiki Kaisha(JP Tokyo)
發(fā)明人
Takahiro Hiraoka; Kensuke Nakamura; Takanori Samejima
IPC分類
H05H1/00; H05H1/24
技術(shù)領(lǐng)域
blowout,plasma,dielectric,electrode,voltage,outlet,gas,generator,substrate,in
地域: Tokyo

摘要

A dielectric barrier plasma generator includes: a dielectric substrate, a high-voltage electrode provided on a first surface of the dielectric substrate, a low-voltage electrode provided to face a second surface of the dielectric substrate, a power introduction section provided at a first end of the high-voltage electrode, a gas channel formed from a first end to a second end thereof between the dielectric substrate and the low-voltage electrode to allow gas to flow from the first end of the gas channel to the second end thereof, and a blowout outlet formed at the second end of the gas channel to blow out the gas that has flown through the gas channel and plasma that has been generated in the gas channel. The dielectric substrate includes a portion having a thickness being thinner when being closer to the blowout outlet.

說(shuō)明書(shū)

In Variation Example 1 shown in FIG. 7 and Variation Example 2 shown in FIG. 8, a protrusion (a protrusion 92 in Variation Example 1, a protrusion 94 in Variation Example 2) is provided on the dielectric substrate 12 between the high-voltage electrode 14 and the blowout outlet 30, making the dielectric substrate with the protrusion that separates the high-voltage electrode 14 from the low-voltage electrode 20. Specifically, in Variation Example 1, the protrusion 92 is provided at the end of the dielectric substrate 12 (directly above the blowout outlet 30). In Variation Example 2, the projection 94 is provided to be in contact with the end of the high-voltage electrode 14 that is closest to the blowout outlet 30. It is also possible to provide the protrusion 92 and the protrusions 94 simultaneously.

The protrusions 92 and 94 can be made of a material exemplified as that of the dielectric substrate 12; however, the protrusions 92 and 94 may be made of the same material or different material from that of the dielectric substrate. The protrusions 92 and 94 may be integrally formed with the dielectric substrate 12 or may be attached thereto as a separate component.

權(quán)利要求

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