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Dielectric barrier plasma generator and plasma discharge starting method for dielectric barrier plasma generator

專利號(hào)
US12219688B2
公開日期
2025-02-04
申請(qǐng)人
Ushio Denki Kabushiki Kaisha（JP Tokyo）
發(fā)明人
Takahiro Hiraoka; Kensuke Nakamura; Takanori Samejima
IPC分類
H05H1/00; H05H1/24
技術(shù)領(lǐng)域
blowout,plasma,dielectric,electrode,voltage,outlet,gas,generator,substrate,in
地域： Tokyo

摘要

A dielectric barrier plasma generator includes: a dielectric substrate, a high-voltage electrode provided on a first surface of the dielectric substrate, a low-voltage electrode provided to face a second surface of the dielectric substrate, a power introduction section provided at a first end of the high-voltage electrode, a gas channel formed from a first end to a second end thereof between the dielectric substrate and the low-voltage electrode to allow gas to flow from the first end of the gas channel to the second end thereof, and a blowout outlet formed at the second end of the gas channel to blow out the gas that has flown through the gas channel and plasma that has been generated in the gas channel. The dielectric substrate includes a portion having a thickness being thinner when being closer to the blowout outlet.

說(shuō)明書

Variation Example 1 and Variation Example 2 are configurations intended to ensure a creepage distance, while allowing the distance between the high-voltage electrode and the low-voltage electrode to be made closer. In Variation Example 1 and Variation Example 2, ensuring a creepage distance and a clearance distance between the high-voltage electrode and the low-voltage electrode prevents unnecessary discharge such as short circuits and the occurrence of creeping discharge between the two electrodes.

Variation Example 3 shown in FIG. 9 describes a configuration in which an unevenness 96 is provided on the dielectric substrate 12 between the end of the high-voltage electrode 14 that is closest to the blowout outlet 30 and a place directly above the blowout outlet 30, ensuring a creepage distance. The increased creepage distance due to the unevenness 96 allows its resistance value to increase, reducing the risk of creeping discharge.

Variation Example 4 shown in FIG. 10 describes a configuration in which the groove 22 of the low-voltage electrode 20 has a tapered portion 98 such that the groove 22 has a wider opening height when being closer to the blowout outlet 30. This configuration ensures a creepage distance between the high-voltage electrode 14 and the low-voltage electrode 20.

權(quán)利要求

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