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Dielectric barrier plasma generator and plasma discharge starting method for dielectric barrier plasma generator

專利號
US12219688B2
公開日期
2025-02-04
申請人
Ushio Denki Kabushiki Kaisha（JP Tokyo）
發(fā)明人
Takahiro Hiraoka; Kensuke Nakamura; Takanori Samejima
IPC分類
H05H1/00; H05H1/24
技術(shù)領(lǐng)域
blowout,plasma,dielectric,electrode,voltage,outlet,gas,generator,substrate,in
地域： Tokyo

摘要

A dielectric barrier plasma generator includes: a dielectric substrate, a high-voltage electrode provided on a first surface of the dielectric substrate, a low-voltage electrode provided to face a second surface of the dielectric substrate, a power introduction section provided at a first end of the high-voltage electrode, a gas channel formed from a first end to a second end thereof between the dielectric substrate and the low-voltage electrode to allow gas to flow from the first end of the gas channel to the second end thereof, and a blowout outlet formed at the second end of the gas channel to blow out the gas that has flown through the gas channel and plasma that has been generated in the gas channel. The dielectric substrate includes a portion having a thickness being thinner when being closer to the blowout outlet.

說明書

Variation Example 5 shown in FIG. 11 describes a configuration in which an insulating film 99 is formed at the end of the high-voltage electrode 14 that is closer to the blowout outlet 30 so as to cover the high-voltage electrode 14. Covering the end of the high-voltage electrode 14 with the insulating film 99 prevents unnecessary discharge such as corona discharge. Examples of the insulating film 99 include glass, sintered bodies containing glass, silicon, and resin materials such as epoxy.

Variation Examples 1 to 5 can ensure a certain distance on a creepage distance and/or a clearance distance between the high-voltage electrode 14 and the low-voltage electrode 20. As a result, this configurations prevent materials constituting these configurations from mixing into the plasma as impurities. They also prevents the electrode wear and the damage to the power supply unit, thus leading to extending the service life of the device. These measures that ensure the creepage distance enable the end of the high-voltage electrode 14 that is closer to the blowout outlet 30 to be positioned closer to the blowout outlet 30, thus achieving highly efficient plasma generation.

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