Dielectric barrier plasma generator and plasma discharge starting method for dielectric barrier plasma generator
摘要
說(shuō)明書(shū)
A dielectric barrier plasma generator according to the present invention includes:
a dielectric substrate;
a high-voltage electrode provided on a first surface of the dielectric substrate;
a low-voltage electrode provided to face a second surface of the dielectric substrate;
a power introduction section provided at a first end of the high-voltage electrode;
a gas channel formed from a first end to a second end thereof between the dielectric substrate and the low-voltage electrode to allow gas to flow from the first end of the gas channel to the second end thereof; and
a blowout outlet formed at the second end of the gas channel to blow out the gas that has flown through the gas channel and plasma that has been generated in the gas channel,
the dielectric substrate includes a portion having a thickness being thinner when being closer to the blowout outlet.
